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XH1 sensor cleaning IBIS

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Hello. I have made a mistake, and i don’t know how bad is it. I have cleaned my sensor with IBIS turned off, and with the camera turned off, So when cleaning with the swab, the sensor was moving slightly. I know now that the correct way was with the IBIS off, but with camera on so the IBIS would be locked in place, but my question is what kind of damage may i have done when the sensor was moving arround by me cleaning it..

Thank you in advance

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